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iLab Name: Blue M Furnace
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: WIl Arnett
Location: Cleanroom - R Bay
Maximum Wafer Size: 2"/50 mm

Overview

General Description

A table-top general purpose furnace for inert and forming gas ambient conditions. The system uses a quartz tube is 3" in diameter with a horizontally on a quartz plate boat. Ramps to 1100 °C using a single temperature zone.

Specifications

  • Max Temperature (°C): 1100°C

  • Max Processing Time (min):

  • Available Gas: N2, Ar, O2, and Forming Gas

  • Vacuum Capability: No

  • Max Wafer Size: 2"/50 mm


Sample Requirements and Preparation

If possible, samples should be Piranha cleaned for 10 minutes. If this is not possible due to material incompatibility, a TAI Solvent clean followed by a mandatory DI water rinse step is permissible.

 

Standard Operating Procedure

 


Questions & Troubleshooting


Process Library

References

 

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