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iLab Name: Blue M Furnace
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: WIl Arnett
Location: Cleanroom - R Bay
Maximum Wafer Size: 2"/50 mm

Overview

General Description

A table-top general purpose furnacefor inert and forming gas ambient conditions. Ramps to 1100C.

Specifications

  • Four process gases, N2, Ar, O2, and Forming Gas.
  • Capable of temperatures up to 1100°C (single temperature zone)
  • Samples lay horizontally on a quartz plate boat.
  • The quartz tube is 3" in diameter.

Sample Requirements and Preparation

If possible, samples should be Piranha cleaned for 10 minutes. If this is not possible due to material incompatibility, a TAI Solvent clean followed by a mandatory DI water rinse step is permissible.

 

Standard Operating Procedure



Questions & Troubleshooting


Process Library

References

 

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