Alpha-Step IQ Profiler SOP Final

This instruction covers the set-up and safe use of the Alpha-Step IQ Profiler measurement system. This tool is a high-sensitivity surface profiler that measures roughness, waviness and step height. The measurement stylus is very fragile and should not be subjected to soft, tacky samples.

SAFETY REQUIREMENTS
1. Safety glasses must be worn whenever in the cleanroom, except when using a microscope or when wearing protective goggles.
2. Do not place hands near the measurement scanner assembly – hand/fingers may be trapped during stage movement
3. Do Not place or move any object near the stylus area or on the measurement area cover as this may damage the fragile stylus and cause extended downtime
2.EQUIPMENT
2.1 KLA-Tencor Alpha-Step IQ (ASIQ)
KLA-Tencor AS-IQ Measurement Tool
Computer, keyboard and mouse
6-inch Rotary table on the measurement stage
CRT Monitor for User Interface
3.TOOL CONFIGURATION
Figure 1
Figure 2
Figure 3
Figure 5
Figure 4
4.CYCLE OF OPERATION
4.1 User time must be scheduled through iLab prior to using the system.
4.2 Ensure the stylus is in the high position before loading the sample. This is done by double-clicking the "Up" arrow seen on the control panel (Figure 4). When the stylus is in high position the "Stop" button will switch from red to grey.
4.3 Open the front Plexiglas panel on the front cover, allowing access to the measurement area. (Figure 1)
4.4 Place the sample on the X-Y stage and, using tweezers, the sample should rest on the front half of the rotary table. (Figure 2)
4.5 Rotate the sample stage until it is under the measurement area.
4.6 Close the front Plexiglas panel on the front cover
4.7 Use the X-stage and Y-stage control knobs to move the sample under the "V" marks on the measurement area cover. The X/Y control knobs are located on the left side of the tool.
4.8 Verify the sample is aligned and under the two "V" marks on the measurement area cover
4.9Select the correct recipe by pressing the "Load…" button
4.9.1Select/highlight the desired recipe from the recipe window
4.9.2Left click on OK to select the recipe
4.10 Double click the down button
4.11 Click the up button once
4.12 Align the area of interest, such as a vertical step, with the red hashed cross displayed on the live image in the upper right corner of the video monitor
4.13 Press the "Start" button. The stylus will lower and scan across the area of interest.
4.14 Wait for the scan to end or press the red "Stop" button if it is necessary to abort the scan.
4.15 Verify the "Step Height Analysis" is displayed in the Analysis window. If not, select this from the Analysis dropdown window
4.16 Press the Leveling button shown in Figure4
4.17 Select the 2 bars or 2 zones depending on your preference
4.18 Please the cursor over the "L" or "R" before Left clicking and holding to position the bar(s). Both the "L" and the "R" bars must be on the same plane for the leveling to work correctly.
4.19 Left click on the desired operation, usually "Level using 2 bars", before clicking on "OK"
4.20 Select the desired step height evaluation, usually 2 bars or 2 zones, and position the "L" and "R" cursors on the step to be measured.
4.21 The height difference between the "L" and "R" bars is displayed next to "Height" to the left of the graphical scan, shown in Figure 4.
4.22 Double click the up button after all measurements have been completed
4.23 Move the stage out away from the measurement area using the Y-stage control knob
4.24Open the front Plexiglas panel on the front cover, allowing access to the measurement area. (Figure 1)
4.25Remove the sample from the X-Y stage rotary table using tweezers. (Figure 2)
4.26Close the front Plexiglas panel on the front cover.
4.27 Log out of iLab
5. SUPPLEMENTAL DATA
PERFORMANCE SPECIFICATIONS
5.1 Measurement of vertical features ranging from under 100Å to approximately 400m (0.4mm) with a resolution of 0.24Å
5.2The maximum horizontal surface scan length is 10cm (when scanning left-to-right)
5.3The minimum spacing between features to be measured must be > 0.01m due to the radius of the stylus
5.4The stage can handle samples up to 150mm (6-inches) wide and 21mm (0.83-inches) thick
DEFINITIONS
5.5Scan Length (mm) is the length of the horizontal scan across the sample
5.6Number of Scans: is the value that defines how many scans will occur before displaying the mean and standard deviation (when greater than 1)
5.7Scan Speed (m/sec); is how fast the stylus will travel across the sample, values between 2 and 200
5.8Sampling Rate (Hz); is the number of samples taken per second, values between 50 and 1000
5.9 Scan Time (s); this is the product of the scan speed, sampling rate and number of scans
5.10Scan Direction ( ); this value should always be Left-to-Right 
5.11Resolution (m); this is defined by the scan speed and the sampling rate
5.12Sensor Range (m, mm); select the range defined by the sample vertical step, if unsure select 2mm
5.13Adjustment; defines the starting point for the sensor range
5.14Contact Speed; the speed at which the stylus approaches the sample
5.15Required Radius; is a fixed value of 5m based on the stylus and should not be adjusted
6.STARTUP and SHUTDOWN
STARTUP
6.1 Turn on the computer is it's not already powered up. The KLA-Tencor logon screen will automatically be displayed. The measurement stage will also initialize during this period.
6.2 Select the username, student, from the dropdown window
6.3 Type "research" in the password window before clicking on "Enter"
6.4Select the desired recipe as described in Section 4, Cycle of Operation
SHUTDOWN
6.4 Left click on the "Exit" button at the top of the Alpha-Step window. See Figure 4
6.5 The software will close and shutdown Windows as well as the computer.

REVISION RECORD

Reason for Revision	Date of Revision	Person Responsible
Initial Release	10/31/19	Rich Harlan