Skip to end of metadata
Go to start of metadata

You are viewing an old version of this page. View the current version.

Compare with Current View Page History

« Previous Version 18 Next »



Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status
: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusDOWN
Issue Date and Description

Pump noisy, won't go below 150mTorr.

Estimated Fix Date and Comment

 Pump rebuilt, testing overnight.

Responding StaffR. Hosler


Specialty furnace/RF power source combination.

SOP:

2D-CVD SOP (Aug 2020).pdf

iLabs Link:

H2S CVD Furnace



  • No labels