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Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.

Status

DOWN

IssueBNC staff training, plasma issues
Estimated Resolution Timeframe

TBD

Comment



Image result for AJA ion mill

iLab Name: AJA Ion Mill
iLab Kiosk: BRK Etch Core
FIC: Sunil Bhave
Owner: Neil Dilley
Location: Cleanroom - Q Bay
Maximum Wafer Size: 6"

Overview

General Description

This system is used for direct milling of thin films.

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References


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