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Leica Confocal

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Created by Wirth, Justin C, last modified on Apr 30, 2018

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Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.

Status	UP
Issue
Estimated Resolution Timeframe

iLab Name: Leica Confocal
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Sean Rinehart
Location: Cleanroom - J Bay
Maximum Wafer Size:

Overview

General Description

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

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