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AJA Ion Mill

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Created by Former user , last modified by Wirth, Justin C on Nov 06, 2018

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Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.

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iLab Name: AJA Ion Mill
iLab Kiosk: BRK Etch Core
FIC: Sunil Bhave
Owner: Neil Dilley
Location: Cleanroom - Q Bay
Maximum Wafer Size: 6"

Overview

General Description

This system is used for direct milling of thin films.

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References

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