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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusRelocating Furnace
Issue Date and Description

  Relocating

Estimated Fix Date and Comment


Responding StaffR. Hosler


Furnace is moving to BRK2221. Should be complete in early 2025.


Specialty furnace/RF power source combination.

SOP:

2D-CVD SOP (Aug 2020).pdf

iLabs Link:

H2S CVD Furnace



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