Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name: C - Cascade Tek TVO-2 Vacuum Oven
iLab Kiosk: BRK Lithography Core
FIC: Shared
Owner: Matt Hayes
Location: Cleanroom - M Bay
Maximum Wafer Size: 12"/300 mm

Overview

General Description

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Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting