CrossLab Name: Alpha-Step
FIC: Shared
Owner: Sean Rinehart
Location: Cleanroom - Bay L
Maximum Wafer Size: 8"/200 mm

Overview

General Description

The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.

Specifications

Accommodates up to 150mm (6") substrate and 21mm (0.83") thick. Measurement of vertical features ranging from 100 nm to approximately 2mm. Lateral feature detection is limited by the 5 um stylus radius.

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting