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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: T64000 Raman
iLab Kiosk: BRK Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size: 

Overview

General Description

Microscope-coupled triple monochromator with first two stages in double-subtractive configuration and LN2 cooled CCD detector

Specifications

Raman spectroscopy with exceptionally low (5cm-1) frequency reach, excitation wavelengths across visible spectrum

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References

 

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