iLab Name: Alpha-Step
iLab Kiosk: BRK Metrology Core
FIC: Shared
Owner: Dan Hosler
Location: Cleanroom - P Bay
Maximum Wafer Size: 6" / 150 mm
Overview
General Description
The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.
Specifications
Accommodates up to 150mm (6") substrate and 21mm (0.83") thick. Measurement of vertical features ranging from 100 nm to approximately 2 mm. Lateral feature detection is limited by the 5 μm stylus radius.
Sample Requirements and Preparation
There are no real requirements, but keep in mind that flexible substrates may experience slight deformation under the 20 mg of force applied by the stylus tip.
Standard Operating Procedure
Training / Video SOP
Written SOP
Questions & Troubleshooting
What's the difference between fast scan speeds and slow scan speeds?
Fast scan speeds take less time, but at the cost of horizontal resolution and roughness data. Under extreme circumstances it can also cause the stylus to skip.
What's the difference between scanning left to right and right to left?
While the tool is capable of measuring right to left, it's designed to go left to right. That's the method that wears the least on the machine.