Versions Compared

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.

...

Page Properties
idinfo

iLab Name

C - Plasma-Therm Versaline DSE Deep Silicon Etcher

iLab Kiosk

BRK Etch Core

FIC

Owner

Francis Manfred

Location

BRK 2100K

Max. Wafer

200 mm / 8 in

Info Links

SOP | Internal  Internal | Staff Staff

...

Overview

General Description

...