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Page Properties
idinfo

iLab Name

C - Plasma-Therm Versaline DSE Deep Silicon Etcher

iLab Kiosk

BRK Etch Core

FIC

Shared

Owner

Francis Manfred

Location

BRK 2100K

Max. Wafer

200 mm / 8 in

Info Links

SOP | InternalStaff

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