iLab Name: Lambda 950
iLab Kiosk: BRK Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size:
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Overview
General Description
Traditional dual-beam spectrophotometer equipped with integrating sphere option to acquire spectra of diffuse light.
Specifications
Complete UV-VIS-NIR spectroscopic characterization of solid and liquid samples in transmission and reflection modes with separately measurable back and forward scattering.
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References