iLab Name: Lambda 950
Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size: 

Overview

General Description

Traditional dual-beam spectrophotometer equipped with integrating sphere option to acquire spectra of diffuse light.

Specifications

Complete UV-VIS-NIR spectroscopic characterization of solid and liquid samples in transmission and reflection modes with separately measurable back and forward scattering.

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References