2025-05-05 to 2025-05-23: Semi-Annual Facility Preventive Maintenance

Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name: Lambda 950
iLab Kiosk: BRK Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size: 

Overview

General Description

Traditional dual-beam spectrophotometer equipped with integrating sphere option to acquire spectra of diffuse light.

Specifications

Complete UV-VIS-NIR spectroscopic characterization of solid and liquid samples in transmission and reflection modes with separately measurable back and forward scattering.

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References