iLab Name: Cleanroom Probe 2 
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: Cleanroom - Q Bay
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station II consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. There is a Kiethley SCS4200 Semiconductor Parameter Analyzer for both IV and CV measurements with an embedded PC to collect the data.

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References