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iLab Name: 
iLab Kiosk:
FIC: Shared
Owner: Neil Dilley
Location: 2100- J (J-bay)
Maximum Wafer Size: 4"/100 mm

Overview

General Description

An Everbeing EB-6 high precision probe station is available for DC wafer probing. There is a Tektronix 4200-SCS Semiconductor Parameter Analyzer for both IV and CV measurements to collect the data. Details on the parameter analyzer are available here : https://www.tek.com/keithley-4200a-scs-parameter-analyzer-manual-1 

Features

• Low profile coaxial-driven style stage (optional large knob precision stage)

• Back-lash free movement

• Mounting for 12 micropositioners

• 4.5” Probe Card Holder compatible

• Micropositioner Standby Dock

• Microscope Tilting for E-Z lens switching

Applications

• Basic IV/CV

• RF, Single Broadband Probing

• High Voltage, High Current

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

References