Newly Installed Equipment Highlights

Probe station LakeShore CRX-VF: 2.5 Tesla vertical B-field, Temp from10 K - 500 K, DC to 40 GHz probing

Probe station MicroXact CPS-50-HT: up to 900 C, high vacuum or inert gas, DC up to 40 GHz (RF to 500 C)

Probe station LakeShore CRX-4K: 4.5 K - 350 K, DC to 40 GHz probing

Probe station FormFactor PAV200: semi-automatic 8" wafer scale probing from DC to 67 GHz, high vacuum (1e-6 torr), up to 300 C

Real-time oscilloscope Keysight DSOV134A: 13 GHz, 80/40 GSa/s, 4-port

Arbitrary Waveform Generator Keysight M8195A: 65 GSa/s, 16 GSa memory, sequencer, fast switching, 4 channels

Vector network analyzer Copper Mountain S5243: 10 MHz - 44 GHz, 2 port

Semiconductor Parameter Analyzers Keysight B1500A and Keithley 4200A: combined multi-frequency C-V and I-V, hi-res SMUs (<10 fA)

High current-voltage curve tracer bundle Keithley 2651A/2657A/2636B/4200A-SCS: I-V and C-V to 2 kV / 100 amp

Advanced low frequency noise analyzer Keysight E4727B A-LFNA: 30 mHz - 100 MHz

32-channel digital pattern instrument NI PXIe-6571

New recharge facility in Wang Hall: RF measurements

Suite of Keysight equipment for advanced RF measurements including Keysight PNA-X N5247B, PNA-L N5232B, PXA N9030B, AWG M8196A, oscilloscope UXR0134A, oscilloscope MXR058A

Overview

Electrical Properties

Probe stations are used in conjunction with semiconductor parameter analyzers, lock-in amplifiers, function generators, and curve tracers to electrically drive devices and measure the performance and outputs of semiconductors, metals, superconductors, and transistors.

Eight probe stations (LakeShore, Cascade, FormFactor, MM, Jandel) both inside and outside the clean room, providing a temperature range of 4.5 K up to 1173 K (900 C) and magnetic fields up to 2.5 T; Environments can be air, vacuum or inert gas, and measurements can be made from DC to RF (40 GHz) in time or frequency domain
Quantum Design DynaCool PPMS cryogen-free platform provides 1.8 – 400 K temperature range and magnetic fields up to 9 T
Oxford Triton cryogen-free dilution refrigerator provides temperatures down to 10 mK and magnetic fields up to 12 T

Magnetic Properties

These instruments measure the magnetic fields emanating from, or inside of, the material under study. This allows us to quantify the total number of magnetic spins in a material, its magnetic anisotropy, magnetic phase transitions and GHz spin dynamics. Samples can be thin films, powder, bulk or single crystals. Equipment includes:

Quantum Design MPMS-3 EverCool SQUID magnetometer:

high sensitivity <10^-8 emu (10^-11 A-m²) noise floor
temperature from 1.8 – 1000 K
magnetic field up to ±7 tesla
SQUID AC susceptibility from 0.1 – 1000 Hz
High speed: m(H) loops in minutes
Samples: film, bulk, crystals, powder
8mm diameter sample space (4x4mm film typical)

Quantum Design DynaCool PPMS:

Vibrating sample magnetometer (VSM) with <10^-6 emu sensitivity
Broadband ferromagnetic resonance (FMR) up to 18 GHz
Temperature from 1.8 – 400 K
Magnetic field up to ±9 tesla

DynaCool PPMS is also equipped for thermal measurements:

Bulk thermal conductivity, Seebeck coefficient, Nernst effect, thermoelectric ZT
Heat capacity microcalorimeter

Research scientists in charge:

Quantum Design lab - Neil Dilley

Probe station lab - Angshuman Deka

Wang Hall RF lab - Ahmad Darwish

Probe station comparison table

Station name	location	# probes	Sample size max	Chuck bias?	Stage temp range	Comments/features
Probe 1 - Cascade MPS150 DC probe station	2043	4	4 inch	yes	20 to 200 C
MM P200L semi-automatic probe station	2043	4	8 inch	yes	-65 to +400 C	Semi- Automatic wafer mapping Probe Station.
PAV200 semi-automatic probe station	2043	4DC/2RF	8 inch	yes	25 C to 300 C	Semi- Automatic wafer mapping Probe Station.
LakeShore CRX-VF probe station	2043	4DC/2RF	2 inch	yes	10 - 500 K	2.5 tesla vertical B-field; RF to 40 GHz
LakeShore CRX-4K probe station	2043	4DC/2RF	2 inch	yes	25 - 900 K	DC to 40 GHz, High Temperature RF upto 500 C
MicroXact CPS50 HT probe station	2043	4DC/2RF	2 inch	yes	4.5 - 350 K	DC to 40 GHz
Jandel 4-point probe	2043	4	N/A	N/A	N/A	Sheet resistance measurements
MDC Mercury probe	2043	2	4 inch	yes	N/A	CV characterization of non contact sample
MM 6000 Cleanroom DC Probe station	Q Bay	4	4 inch	yes	N/A	Cleanroom probe station
Desert Cryo probe station	2069	4	2 inch		3.2K to 675K	PI: Peide Ye
Oxford Triton Dilution Refrigerator	F Bay					PI: Peide Ye
Quantum Design DynaCool PPMS	1157	12	10mm		1.8 – 400 K	B= 9 tesla; Feedthru for any rack electronics
Quantum Design MPMS-3 SQUID Magnetometer	1157	8	5mm		1.8 – 400 K	B = 7 tesla; Feedthru for any rack electronics
Suss PLV50 DC probe station	1089A	4	4 inch			LDV compatible
Alessi probe station	2037					PI: Alam
Cascade Summit probe station	2037					PI: Alam
Nextron probe station (on optical table)	2037	4			down to 77 K	vacuum, controlled atmosphere; PI: Hussain
MMR probe station (on optical table)	2037	4				vacuum, controlled atmosphere; PI: Hussain
Cascade PMC 200 DC/RF probe station	1083	4RF/2DC	6 inch	Yes	7 to 473 K	Low Noise, high vacuum Probe Station. PI: Dana Weinstein

BRK 2043 - measurement units available with probe stations

instrument	frequency range	source/measure			comments
instrument	frequency range	V	I	R	comments
Agilent 4156C	DC	0 - 100 V µV – 100 V	10 fA – 100 mA fA – 100 mA		I-V, C-V, pulsed ; precision semiconductor parameter analyzer; measure specs for HRSMU ; voltage input impedance > 10¹⁵ Ω
Keithley 4200A-SCS parameter analyzer	DC I-V low freq C-V	0 ± 210 V 0.2 µV – 100 V	0 ± 100 V 100 fA – 1 A		I-V, C-V, pulsed I-V
Keysight E4990A impedance analyzer	20 Hz – 50 MHz				measures complex impedance; DC biasing (V or I) also possible
Hewlett Packard 4284	20 Hz - 1 MHz				measures complex impedance; DC biasing (V or I) also possible
Keysight B1500A parameter analyzer	DC I-V 1 kHz to 5 MHz C-V
Keysight DSOV134A oscilloscope	13 GHz BW 4 Analog Channels 80 GSa/s
Keysight M8195A arbitrary waveform generator	DC to 25 GHz BW 65 GSa/s 16 GSa memory
Copper Mountain S5243 VNA	10 MHz - 44 GHz 2 Port
Keithley High Power Measurement Suite	DC or Pulsed	Source or sink up to 180 W ±3000 V @ 20 mA ±1500 V @ 120 mA	2,000 W of pulsed power (±40 V, ±50 A) 200 W of DC power (±10 V @ ±20A, ±20 V @ ±10 A, ±40 V @ ±5 A)

Spin Lab BRK1157A - measurement units for use with the DynaCool PPMS

instrument	frequency range	source/measure			comments
instrument	frequency range	V	I	R	comments
Keithley 2182A nanovoltmeter	DC	nV – 100 V			most sensitive DC voltage measurement from Keithley
Keithley 2000 multimeter	DC	µV – kV	0.1 µA – 3 A	µΩ – 100 MΩ
Keithley 2400 sourcemeter	DC	µV – 200 V µV – 200 V	10 pA – 1 A 10 pA – 1 A	µΩ – 10 GΩ
Keithley 2636B sourcemeter	DC	5 µV – 200 V 100 nV – 200 V	1 fA – 1.5 A 100 aA – 1 A	µΩ – TΩ	sense input impedance >10¹⁴ Ω
Keithley 6221 DC/AC current source	DC – 100 kHz		1 pA – 100 mA		output resistance >10¹⁴ Ω
Keithley 6487 pA-meter / V src	DC	mV – 500 V	20 fA – 20 mA
SR830 lock-in amplifier	1 mHz – 102 kHz	6 mV – 7 V 8 nV/√Hz	10⁶ or 10⁸ V/A		digital lock-in; input impedance = 10 MΩ (V); 1 kΩ (I); noise level at 1 kHz
SR560 preamp	DC - MHz	6 nV/√Hz			input impedance = 100 MΩ; noise level at 1 kHz; gain: 1 – 50,000
Stanford DS345 function generator	DC – 30 MHz	5 mV – 5 V			source impedance = 50 Ω; DC + AC source
Yokogawa GS200 V/I source	DC	100 nV – 30 V	10 nA – 200 mA
Ametek 5210 lock-in amplifier	0.5 Hz – 120 kHz	~ mV – ~ 5 V ~ nV/√Hz	< fA		analog lock-in; V noise level at 1 kHz
Quantum Design ETO	DC - 200 Hz	0 - 12 V 1.5 nV/√Hz	10 nA - 100 mA ~ nA	µΩ – 5 GΩ	digital lock-in; 2 independent channels
Quantum Design Resistivity	DC	~ 10 nV/√Hz	10 nA - 10 mA	mΩ – MΩ	measurements are chopped +/- at 10 Hz; multiplexed to 3 channels

Contact: Neil Dilley – ndilley@purdue.edu

Educational Resources

"Learn How to Optimize Low-Level Measurements using Lake Shore Cryogenic Probe Stations and Quantum Design PPMS®"

November 16, 2023

Keysight Lunch & Learn seminar:
"Advanced Material and Device Characterization with the B1500A Parameter Analyzer"

November 2, 2023

BNC Tutorial
"A Practical guide to electrical characterization of materials at BNC"
February 4, 2020

seminars from this workshop:

"Electrical measurements: contacts, measurement electronics, general advice" ; Dr. Neil Dilley, BNC

"A Short Guide to Cryogenic Probing & Transport Measurements", Dr. David Daughton, LakeShore Cryotronics

"Electrical Transport Tutorial: The Final frontier", Dr. Nithin Raghunathan, BNC

"A Faster Hall Measurement", Dr. Jeff Lindemuth, LakeShore Cryotronics

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