CrossLab Name: Cleanroom Probe 1
FIC: Shared
Owner: Nithin Raghunathan
Location: BRK 2261
Maximum Wafer Size: 4"/100 mm
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Overview
General Description
Probe Station III I consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an HP4156A Keithley SCS4200 Semiconductor Parameter Analyzer.
Specifications
, an HP 4284A LCR meter. A Windows-NT PC running Labview is used to drive the instruments and collect the data.
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References