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Probe 1 - Cascade MPS150 DC Probe Station

Probe 1 - Cascade MPS150 DC Probe Station

Dec 18, 2025

Status

UP

Issue Date and Description

 

Estimated Fix Date and Comment

 

Responding Staff

 

iLab Name: Probe 1
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Neil Dilley
Location: J Bay
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station I consists of a Cascade MPS150 in a dark box on top of a vibration isolation table. The test equipment consists of two Keithley 4200A-SCS Semiconductor Parameter Analyzers, one equipped with C-V measurement capability. Also available is an HP 4284A LCR meter. A heated stage (ERS model AC3) provides temperature control up to 200 C with sample sitting in ambient air.

 

Sample Requirements and Preparation

 

Standard Operating Procedures

 

Demo and Control samples

Purple 1"x1" PC boards with various capacitors (10 pF - 100 nF) and resistors (100 ohm - 100 Mohm), for checking operation of I-V and C-V on Probe 1 or any probe station at room temperature. Low temperature fixed point samples (Nb foil) will be added in the future for use on the CRX probers.

Measurement data is attached in .XLSX format for downloading, and component specs are in Parts List file. Three (3) boards are available from BRK staff and are kept in the dry box in 2043. Please return them when done using!

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References