Probe 1 - Cascade MPS150 DC Probe Station

2024-12-20 to 2025-01-02: Reduced Holiday Operations

Dear Birck Research Community,

The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Probe 1
iLab Kiosk: BRK Characterization Core
FIC:
Shared
Owner:
 Neil Dilley
Location:
J Bay
Maximum Wafer Size: 
4"/100 mm

Overview

General Description

Probe Station I consists of a Cascade MPS150 in a dark box on top of a vibration isolation table. The test equipment consists of two Keithley 4200A-SCS Semiconductor Parameter Analyzers, one equipped with C-V measurement capability. Also available is an HP 4284A LCR meter. A heated stage (ERS model AC3) provides temperature control up to 200 C with sample sitting in ambient air.


Sample Requirements and Preparation


Questions & Troubleshooting



Process Library


References