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iLab Name: Probe 1
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Neil Dilley
Location: J Bay
Maximum Wafer Size: 4"/100 mm
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Overview
General Description
Probe Station I consists of a Cascade MPS150 in a dark box on top of a vibration isolation table. The test equipment consists of two Keithley 4200A-SCS Semiconductor Parameter Analyzers, one equipped with C-V measurement capability. Also available is an HP 4284A LCR meter. A heated stage (ERS model AC3) provides temperature control up to 200 C with sample sitting in ambient air.
Sample Requirements and Preparation
Questions & Troubleshooting
Process Library
References
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