iLab Name: Carbon Nanotube PECVD
iLab Kiosk:
FIC: Tim Fisher
Owner: Dave Lubelski
Location: BRK 2283
Maximum Wafer Size: 2"/50 mm
| Table of Content Zone | ||||||||
|---|---|---|---|---|---|---|---|---|
| ||||||||
|
Overview
General Description
Seki Techtron Diamond PECVD modified to grow carbon nanotubes.
Specifications
Limited access, see PI.
Technology
Overview - Remove if multiple tools use the same technology/processOverview
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References