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Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.
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iLab Name: Hall Effect MMR
iLab Kiosk: BRK Characterization Core
FIC: Tim Sands
Owner: Nithin Raghunathan
Location: BRK 1217
Maximum Wafer Size:
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Overview
General Description
Hall effect system for measuring resistivity, mobility, carrier concentration and dopant type of a wide range of samples using the Van der Pauw method.
Specifications
- Sample size 14mm x 10mm maximum
- Temperature range 80K-400K
- Magnetic field 3300G maximum
System components:
- H-50 Hall, Van der Pauw controller
- MPS-50 programmable power supply
- K-20 temperature controller
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References