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Many users have had success with UIUC for their photomasks. The system is an older TRE tool, making the prices very reasonable. Rectangular patterns with larger than 3 um critical dimensions should see good results from these.
- UIUC: https://mrl.illinois.edu/facilities/micronanofabrication-facility/mrl-professional-photomaskmask-fabrication-services
Commercial suppliers
- TOPPAN Photomask: https://www.photomask.com/
Pricing: ~$500 for Chrome and $700 for Iron Oxide. - Frontrange Photomask: https://frontrange-photomask.com/
- Advance Reproductions: http://advancerepro.com/
- 5 day turn around
- ~$500 base price for 5 inch Chrome, extra $100 for 2 um, extra $100 for Iron Oxide.
- Benchmark Technologies: http://www.benchmarktech.com/photomasks
- Applied Image: https://www.appliedimage.com/products/photomask-semiconductor-services
- Past users have reported: Pricing was ~$550 dollars for chrome, took a lot of back and forth to get 4 um features, quote 1 week lead time.
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