Photomask Fabrication

Owned by Wirth, Justin C
Last updated: Oct 19, 2020

Photomasks at BNC are made on the Heidelberg MLA150 using a laser direct write process.

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text-align:center; vertical-align:middle; white-space:nowrap; background:auto; mso-pattern:auto; color:#000000; font-size:11pt; font-weight:700; font-style:normal; font-family:"Calibri","sans-serif"; mso-protection:locked visible; }.x30 { mso-style-parent:style0; mso-number-format:General; text-align:left; vertical-align:bottom; white-space:nowrap; background:auto; mso-pattern:auto; color:#000000; font-size:11pt; font-weight:400; font-style:italic; font-family:"Calibri","sans-serif"; mso-protection:locked visible; }.x31 { mso-style-parent:style0; mso-number-format:General; text-align:left; vertical-align:bottom; white-space:nowrap; background:auto; mso-pattern:auto; color:#000000; font-size:11pt; font-weight:400; font-style:normal; font-family:"Calibri","sans-serif"; mso-protection:locked visible; }--></style><div class="cells-worksheet" data-sheet-number="0" data-sheet-name="Sheet2"><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;table-layout:fixed;width:443pt"> <colgroup> <col style="mso-width-source:userset;width:99px"></col> <col span="6" style="mso-width-source:userset;width:82px"></col> </colgroup> <tbody> <tr style="mso-height-source:userset;height:15pt" id="r0"> <td style="height:15pt"></td> <td colspan="6" style="mso-ignore:colspan"></td> </tr> <tr style="mso-height-source:userset;height:15.75pt" id="r1"> <td colspan="7" class="x29" style="height:15.75pt">Birck Nanotechnology Center Photomask Fabrication Price List - Updated 9/26/2023</td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r2"> <td style="height:15pt"></td> <td colspan="3" class="x26" style="border-right:2px solid windowtext">1st mask per order</td> <td colspan="3" class="x26" style="border-right:2px solid windowtext">Additional masks, up to 5 per order</td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r3"> <td style="height:15pt"></td> <td class="x17">INT</td> <td class="x18">ENP/ISB</td> <td class="x19">EFP</td> <td class="x17">INT</td> <td class="x18">ENP/ISB</td> <td class="x19">EFP</td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r4"> <td style="height:15pt">4" Chrome</td> <td class="x20" style="text-align:right">$201.77</td> <td class="x21" style="text-align:right">$406.25</td> <td class="x22" style="text-align:right">$468.23</td> <td class="x20" style="text-align:right">$159.77</td> <td class="x21" style="text-align:right">$309.25</td> <td class="x22" style="text-align:right">$356.23</td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r5"> <td style="height:15pt">4" Iron Oxide</td> <td class="x20" style="text-align:right">$217.39</td> <td class="x21" style="text-align:right">$430.77</td> <td class="x22" style="text-align:right">$496.50</td> <td class="x20" style="text-align:right">$175.39</td> <td class="x21" style="text-align:right">$333.77</td> <td class="x22" style="text-align:right">$384.50</td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r6"> <td style="height:15pt">5" Chrome</td> <td class="x20" style="text-align:right">$206.93</td> <td class="x21" style="text-align:right">$414.35</td> <td class="x22" style="text-align:right">$477.57</td> <td class="x20" style="text-align:right">$164.93</td> <td class="x21" style="text-align:right">$317.35</td> <td class="x22" style="text-align:right">$365.57</td> </tr> <tr style="mso-height-source:userset;height:15.75pt" id="r7"> <td style="height:15.75pt">5" Iron Oxide</td> <td class="x23" style="text-align:right">$229.25</td> <td class="x24" style="text-align:right">$449.39</td> <td class="x25" style="text-align:right">$517.96</td> <td class="x23" style="text-align:right">$187.25</td> <td class="x24" style="text-align:right">$352.39</td> <td class="x25" style="text-align:right">$405.96</td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r8"> <td colspan="7" class="x30" style="height:15pt">INT: Internal, ENP: External Non-Profit, ISB: Indiana Small Business, EFP: External For Profit</td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r9"> <td colspan="7" class="x31" style="height:15pt">External orders requiring shipment will also include shipment and staff time shipment costs.</td> </tr> <tr style="mso-height-source:userset;height:75pt;mso-xlrowspan:5" id="r10"> <td style="height:75pt"></td> <td colspan="6" style="mso-ignore:colspan"></td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r11"> <td class="x16" style="height:15pt">Line</td> <td>INT</td> <td>ENP/ISB</td> <td>EFP</td> <td>Quantity</td> <td></td> <td></td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r12"> <td style="height:15pt">MLA150</td> <td style="text-align:right">46</td> <td style="text-align:right">115</td> <td style="text-align:right">132</td> <td style="text-align:right">0.5</td> <td></td> <td></td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r13"> <td style="height:15pt;overflow:hidden">Birck Lab Access</td> <td style="text-align:right">14</td> <td style="text-align:right">44</td> <td style="text-align:right">51</td> <td style="text-align:right">1</td> <td></td> <td></td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r14"> <td style="height:15pt">CR Surcharge</td> <td style="text-align:right">28</td> <td style="text-align:right">53</td> <td style="text-align:right">61</td> <td style="text-align:right">1</td> <td></td> <td></td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r15"> <td style="height:15pt;overflow:hidden">Eng. Staff Time</td> <td style="text-align:right">76</td> <td style="text-align:right">144</td> <td style="text-align:right">166</td> <td style="text-align:right">1.5</td> <td></td> <td></td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r16"> <td style="height:15pt;overflow:hidden">Photomask Case</td> <td style="text-align:right">3.3</td> <td style="text-align:right">5.18</td> <td style="text-align:right">5.98</td> <td style="text-align:right">1</td> <td></td> <td></td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r17"> <td style="height:15pt">4" Chrome</td> <td style="text-align:right">19.47</td> <td style="text-align:right">30.57</td> <td style="text-align:right">35.25</td> <td></td> <td></td> <td></td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r18"> <td style="height:15pt">4" Iron Oxide</td> <td style="text-align:right">35.09</td> <td style="text-align:right">55.09</td> <td style="text-align:right">63.52</td> <td></td> <td></td> <td></td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r19"> <td style="height:15pt">5" Chrome</td> <td style="text-align:right">24.63</td> <td style="text-align:right">38.67</td> <td style="text-align:right">44.59</td> <td></td> <td></td> <td></td> </tr> <tr style="mso-height-source:userset;height:15pt" id="r20"> <td style="height:15pt">5" Iron Oxide</td> <td style="text-align:right">46.95</td> <td style="text-align:right">73.71</td> <td style="text-align:right">84.98</td> <td></td> <td></td> <td></td> </tr> <tr style="display:none"> <td style="width:74.25pt"></td> <td style="width:61.5pt"></td> <td style="width:61.5pt"></td> <td style="width:61.5pt"></td> <td style="width:61.5pt"></td> <td style="width:61.5pt"></td> <td style="width:61.5pt"></td> </tr> </tbody></table></div>

The mask production process flow is:

  1. Design: Researcher designs layout in GDS, CIF, or DXF format using CAD program of choice.

  2. Submission: NOTE: BNC is currently offering mask fabrication on an extremely limited basis, contact Joon Park for more information.
    The previous procedure was:
    1) Researcher submits a Photomask Fabrication Request in the Request Services tab in the BRK Lithography Core iLab page. 

  3. Verification: Staff converts layout into Heidelberg specific LIC file on cleanroom PC.

  4. Acceptance: Researcher meets with staff in cleanroom or staff offices to inspect translated file and give final approval.
  5. Fabrication: After final approval, masks will be completed within 5 business days. Fabrication consists of:
    1. Writing: Staff member writes the appropriate plate on the Heidelberg, with total write time depending on the size of the design (the Heidelberg writes at ~12 mm2/min).
    2. Wet Processing: The written plate is developed, etched, and the remaining PR is removed.
    3. Inspection: Minimum feature size is inspected and recorded.
    4. Completion: The completed photomask is placed in the dry box in cleanroom bay M. Researcher is notified electronically of completion.



Alignment mark examples:

https://snf.stanford.edu/SNF/processes/process-modules/photolithography/maskmaking/layout-files/Cross_Marks27.zip/view