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Overview
Section
Subsection
Sub-subsection
References
Spare Parts Sourcing
Description | Vendor | Part Number | Datasheet | Image |
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Chamber Lid Closed Switch | Digikey | GH1365-ND | http://www.grayhill.com/assets/1/7/Push_30.pdf | |
Pressure Manometer | MKS Instruments | 122A Abs. Manometer (Current) 622C Abs. Manometer (Recommended Replacement) |