March Jupiter II Etcher
- Former user (Deleted)
- Francis R Manfred
- Wirth, Justin C
- Hosler, Richard S
2024-12-20 to 2025-01-02: Reduced Holiday Operations
Dear Birck Research Community,
The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.
Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.
| Status | Up |
| Issue Date and Description | |
| Estimated Fix Date and Comment | |
| Responding Staff | Francis Manfred |
Standard Operating Procedure (SOP):
The document below explains how to minimize the reflected power manually when the tool cannot do it automatically.
Overview
Section
Subsection
Sub-subsection
References
Spare Parts Sourcing
| Description | Vendor | Part Number | Datasheet | Image |
|---|---|---|---|---|
| Chamber Lid Closed Switch | Digikey | GH1365-ND | http://www.grayhill.com/assets/1/7/Push_30.pdf |
|
| Pressure Manometer | MKS Instruments | 122A Abs. Manometer (Current) 622C Abs. Manometer (Recommended Replacement) |
|
