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March Jupiter II Etcher

March Jupiter II Etcher

Owned by Former user (Deleted)

2025-05-05 to 2025-05-23: Semi-Annual Facility Preventive Maintenance

shutdown.jpg


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUp
Issue Date and Description


Estimated Fix Date and Comment

Responding StaffFrancis Manfred

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Standard Operating Procedure (SOP):


The document below explains how to minimize the reflected power manually when the tool cannot do it automatically.

Overview

TypeMaterialsRestricted MaterialsAvailable GasesMax RF PowerWafer Size
CCP RIESi, Oxides, Nitrides, Polymers, Organics
O2, Ar, SF6600 Watts6 inch (150 mm) SEMI Specification

Section

Subsection

Sub-subsection

References

Spare Parts Sourcing

DescriptionVendorPart NumberDatasheetImage
Chamber Lid Closed SwitchDigikeyGH1365-NDhttp://www.grayhill.com/assets/1/7/Push_30.pdf

Pressure ManometerMKS Instruments

122A Abs. Manometer (Current)

622C Abs. Manometer (Recommended Replacement)

https://www.mksinst.com/Docs/R/122A-MAN.pdf

http://www.mksinst.com/docs/UR/622C626C-DS.pdf


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