March Jupiter II Etcher
Status | Up |
Issue Date and Description |
|
Estimated Fix Date and Comment |
|
Responding Staff | Francis Manfred |
Standard Operating Procedure (SOP):
The document below explains how to minimize the reflected power manually when the tool cannot do it automatically.
Overview
Type | Materials | Restricted Materials | Available Gases | Max RF Power | Wafer Size |
|---|---|---|---|---|---|
CCP RIE | Si, Oxides, Nitrides, Polymers, Organics |
| O2, Ar, SF6 | 600 Watts | 6 inch (150 mm) SEMI Specification |
Section
Subsection
Sub-subsection
References
Spare Parts Sourcing
Description | Vendor | Part Number | Datasheet | Image |
|---|---|---|---|---|
Chamber Lid Closed Switch | Digikey | GH1365-ND | | |
Pressure Manometer | MKS Instruments | 122A Abs. Manometer (Current) 622C Abs. Manometer (Recommended Replacement) | |