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nameMarch Jupiter 2 SOP-F11-ManualMode8.pdf
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Insert excerpt
Problem Reporting Guide
Problem Reporting Guide
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StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding StaffFrancis Manfred

This document explains how to minimize the reflected power manually when the tool cannot do it automatically.

View file
nameManual Tuning Procedure.pdf
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Table of Contents
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Overview

Section

Subsection

Sub-subsection

References

Spare Parts Sourcing

DescriptionVendorPart NumberDatasheetImage
Chamber Lid Closed SwitchDigikeyGH1365-NDhttp://www.grayhill.com/assets/1/7/Push_30.pdf

Pressure ManometerMKS Instruments

122A Abs. Manometer (Current)

622C Abs. Manometer (Recommended Replacement)

https://www.mksinst.com/Docs/R/122A-MAN.pdf

http://www.mksinst.com/docs/UR/622C626C-DS.pdf


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