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iLab Name: Thermo Scientific Helios G4 UX Dual Beam
iLab Kiosk: Purdue Electron Microscopy Facility
FIC: Rosa Diaz
Owner: Xingtao Liu
Location: BRK 1237
Maximum Wafer Size: 2"/50 mm
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Overview
General Description
Specifications
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library