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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff




iLab Name: Thermo Scientific Helios G4 UX Dual Beam
iLab Kiosk: Purdue Electron Microscopy Facility
FIC: Rosa Diaz
Owner: Xingtao Liu
Location: BRK 1237
Maximum Wafer Size: 2"/50 mm

Overview

General Description

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


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Process Library

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