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iLab Name:Cleanroom Probe 2 Probe 2
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: Cleanroom - Q Bay 2100- J (J-bay)
Maximum Wafer Size: 4"/100 mm
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Overview
General Description
Probe Station II I consists of a Micromanipulator 6000 probe station in a dark box on top of a vibration isolation table. Like a ll probe stations, theutilised for the electrical testing There is a Kiethley SCS4200 Semiconductor Parameter Analyzer for both IV and CV measurements with an embedded PC to collect the data.
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References