iLab Name: Cleanroom Probe 1
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: Cleanroom - Q J Bay
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station III consists of a Micromanipulator 8860 in a dark box on top of a vibration isolation table. The test equipment consists of an Tektronix 4200-SCS Semiconductor Parameter Analyzer similar to those used in probe stations I and II.  Details on the measurement system including measurement examples are available here: https://www.tek.com/product-support?series=Keithley%204200A-SCS%20Parameter%20Analyzer&type=manual

The model 8860 semi-automatic analytical test station provides the base or foundation for quality test results. The 8860’s stage has ±1.5mm repeatability and accuracy with a resolution of 0.1mm for the thin lines and small pads to be probed. User-friendly pcProbe II software with the pcSetup wizard permits complicated test routines to be developed with ease then stored for future tests. Micromanipulator’s H1000 Thermal System provides a single chuck with a temperature range from –65 degrees C to 400 degrees C. Engineered specifically for use in a probe station, the thermal chuck is guarded to protect the station from heat radiated down into the body of the station. The chuck’s plumbing is completely contained within the footprint of the 8860 and the hoses carrying the cooling fluid feature self sealing quick disconnects to prevent fluid leakage.

Specifications

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References