MM P200L Semi-Automatic Probe Station
Status | UP |
Issue Date and Description | |
Estimated Fix Date and Comment | |
Responding Staff |
iLab Name: MM P200L Semi-Automatic Probe Station
iLab Kiosk: BRK Characterization Core
FIC: Peter Bermel
Owner: Neil Dilley
Location: Cleanroom - J Bay
Maximum Wafer Size: 8"/200 mm
Overview
General Description
Consists of a Micromanipulator P200L semi-automatic wafer mapping probe station (upgraded from a Micromanipulator 8860 in 2017) .
Designed for low current, sub-micron positioning applications, the Micromanipulator P200L comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as precision, the P200L features leadscrew - leadnut stage and platen drives, a stainless steel platen with removable front wedge and high stability microscope bridge that supports all high resolution long-working distance microscopes.
Specifications
200mm semiautomatic wafer prober
Stage 200 x 200mm (X-Y), x 25mm (Z - platen) drive range: Supports wafers / samples up to 200mm
Stage resolution 0.5 micron, accuracy +/- 5 um, repeatability +/- 2 um. Supports probing of the smallest targets.
NETPROBE-7 control software with wafer map, integrated video, theta alignment, sub-die, and pattern recognition
Integrated digital microscope with optical and thermal IR detection.
Drivers available for popular testers companies including Keysight, Keithley, and LabVIEW
Configurable for DC, RF, Microwave, and High Power applications
-65C to 400C configurable
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library