MM P200L Semi-Automatic Probe Station

Owned by Neil Dilley
Last updated: Sept 20, 2023


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

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Responding Staff


iLab Name: MM P200L Semi-Automatic Probe Station
iLab Kiosk: BRK Characterization Core
FIC: Peter Bermel
Owner: Neil Dilley
Location: Cleanroom - J Bay
Maximum Wafer Size: 8"/200 mm

Overview

General Description

Consists of a Micromanipulator P200L semi-automatic wafer mapping probe station (upgraded from a Micromanipulator 8860 in 2017) .

Designed for low current, sub-micron positioning applications, the Micromanipulator P200L comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as precision, the P200L features leadscrew - leadnut stage and platen drives, a stainless steel platen with removable front wedge and high stability microscope bridge that supports all high resolution long-working distance microscopes.

Specifications

  • 200mm semiautomatic wafer prober
    • Stage 200 x 200mm (X-Y), x 25mm (Z - platen) drive range:  Supports wafers / samples up to 200mm
    • Stage resolution 0.5 micron, accuracy +/- 5 um, repeatability +/- 2 um. Supports probing of the smallest targets.
  • NETPROBE-7 control software with wafer map, integrated video, theta alignment, sub-die, and pattern recognition
  • Integrated digital microscope with optical and thermal IR detection.
  • Drivers available for popular testers companies including Keysight, Keithley, and LabVIEW
  • Configurable for DC, RF, Microwave, and High Power applications
  • -65C to 400C configurable


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References