MM P200L Semi-Automatic Probe Station

Owned by Neil Dilley
Last updated: Sept 20, 2023

2024-12-20 to 2025-01-02: Reduced Holiday Operations

Dear Birck Research Community,

The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: MM P200L Semi-Automatic Probe Station
iLab Kiosk: BRK Characterization Core
FIC: Peter Bermel
Owner: Neil Dilley
Location: Cleanroom - J Bay
Maximum Wafer Size: 8"/200 mm

Overview

General Description

Consists of a Micromanipulator P200L semi-automatic wafer mapping probe station (upgraded from a Micromanipulator 8860 in 2017) .

Designed for low current, sub-micron positioning applications, the Micromanipulator P200L comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as precision, the P200L features leadscrew - leadnut stage and platen drives, a stainless steel platen with removable front wedge and high stability microscope bridge that supports all high resolution long-working distance microscopes.

Specifications

  • 200mm semiautomatic wafer prober
    • Stage 200 x 200mm (X-Y), x 25mm (Z - platen) drive range:  Supports wafers / samples up to 200mm
    • Stage resolution 0.5 micron, accuracy +/- 5 um, repeatability +/- 2 um. Supports probing of the smallest targets.
  • NETPROBE-7 control software with wafer map, integrated video, theta alignment, sub-die, and pattern recognition
  • Integrated digital microscope with optical and thermal IR detection.
  • Drivers available for popular testers companies including Keysight, Keithley, and LabVIEW
  • Configurable for DC, RF, Microwave, and High Power applications
  • -65C to 400C configurable


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References