iLab Name: Cleanroom Probe Probe 1
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Nithin RaghunathanNeil Dilley
Location: BRK 2261 J Bay
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station I consists of a Micromanipulator 6000 Cascade MPS150 in a dark box on top of a vibration isolation table. The test equipment consists of an two Keithley SCS4200 4200A-SCS Semiconductor Parameter Analyzer, Analyzers, one equipped with C-V measurement capability. Also available is an HP 4284A LCR meter . A Windows-NT PC running Labview is used to drive the instruments and collect the data....(under construction, more test equipment to add)

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References