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Problem Reporting Guide
Problem Reporting Guide
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StatusDOWNUP
Issue Date and Description The Z position of the scanner cannot be recognized by software. A user forgot to close the software before turning off AFM controller.


Estimated Fix Date and Comment
 The main issue was resolved. After test run and back up, the toll will be open at 2:30pm 


Responding StaffJoon Park




Page Properties
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iLab Name

C - Park NX20 AFM

iLab Kiosk

BRK Metrology Core

FIC

Shared

Owner

Joon Park

Location

Cleanroom - Bay P

Max. Wafer

6"/150mm

Info Links/wiki/spaces/BNCWiki/pages/6251230| /wiki/spaces/BNCWiki/pages/6248646




Table of Content Zone
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Table of Contents
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Overview

General Description

Tip

This is an example of a tip


Warning

This is an example of a tool warning

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure

  • SOP ()

         

View file
namePark NX20 AFM SOP.pdf
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Questions & Troubleshooting



Process Library

References