Park NX20 AFM

Owned by Joon Hyeong Park
Last updated: Oct 18, 2024

2024-12-20 to 2025-01-02: Reduced Holiday Operations

Dear Birck Research Community,

The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description
Estimated Fix Date and Comment

Responding Staff



iLab Name

C - Park NX20 AFM

iLab Kiosk

BRK Metrology Core

FIC

Shared

Owner

Joon Park

Location

Cleanroom - Bay P

Max. Wafer

8"/200mm

Info Links/wiki/spaces/BNCWiki/pages/6251230| /wiki/spaces/BNCWiki/pages/6248646

Overview

General Description


Specifications

  • Scanner
    • Z scanner (AFM Head): Flexure guided high-force scanner, Scan range: 15um / Typical sample height to measure: <1um
    • XY scanner: Dual-servo closed-loop feedback control for precise XY positioning, Scan range: 100um x 100um / If you would like to scan more than 50um far from the initial engage point, the scanner should be redraw and engage again.
  • Stage
    • XY stage travel range: 200mm
    • Z stage travel range: 25mm
    • Focus stage travel range: 8mm
  • Vision
    • Field of view: 840um x 630um
    • 10 x ultra-long working distance lens 

Technology Overview


Sample Requirements and Preparation


Standard Operating Procedure

  • SOP ()

         

  • Clip Type Chip Carrier Guide


Questions & Troubleshooting



Process Library

References