Park NX20 AFM

Owned by Joon Hyeong Park
Last updated: Oct 18, 2024
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description
Estimated Fix Date and Comment

Responding Staff



iLab Name

C - Park NX20 AFM

iLab Kiosk

BRK Metrology Core

FIC

Shared

Owner

Joon Park

Location

Cleanroom - Bay P

Max. Wafer

8"/200mm

Info Links/wiki/spaces/BNCWiki/pages/6251230| /wiki/spaces/BNCWiki/pages/6248646

Overview

General Description


Specifications

  • Scanner
    • Z scanner (AFM Head): Flexure guided high-force scanner, Scan range: 15um / Typical sample height to measure: <1um
    • XY scanner: Dual-servo closed-loop feedback control for precise XY positioning, Scan range: 100um x 100um / If you would like to scan more than 50um far from the initial engage point, the scanner should be redraw and engage again.
  • Stage
    • XY stage travel range: 200mm
    • Z stage travel range: 25mm
    • Focus stage travel range: 8mm
  • Vision
    • Field of view: 840um x 630um
    • 10 x ultra-long working distance lens 

Technology Overview


Sample Requirements and Preparation


Standard Operating Procedure

  • SOP ()

         

  • Clip Type Chip Carrier Guide


Questions & Troubleshooting



Process Library

References