iLab Name: Accretech SS20
iLab Kiosk: BRK Packaging and Assembly Core
FIC: Shared
Owner: Mihailo Bradash
Location: BRK 1254
Maximum Wafer Size: 8"/200 mm

Overview

General Description

The Accretech SS20 dicing saw is a precision sawing machine used in cutting semiconductor and MEMS wafers for separation of individual chips or devices. Pieces to be cut are mounted on wafer tape, which allows any size and shape of sample to be cut, up to 8 inches in diameter, and up to 1 millimeter thick. A supply of blades is on hand for most common substrates. Unusual substrates or non-standard cutting dimensions (i. e. extremely narrow kerf) may necessitate ordering special blades. There may be an extra cost to order special blades.

Specifications

Technology Overview 

Sample Requirements and Preparation

No special sample preparation is required.  Users have the option of applying a sacrificial layer of photoresist to the top surface of the sample prevent surface damage. 

Samples over 1 mm thick require special handling and specific blades.  Please consult Tim Miller or Mihailo Bradash before attempting to cut anything over 1 mm in thickness. 

Standard Operating Procedure

Questions & Troubleshooting

Under no conditions should a user try to replace a broken blade!  Please contact Tim Miller or Mihailo Bradash to have it replaced.

Process Library

References