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Problem Reporting Guide
Problem Reporting Guide
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StatusDOWNUP
Issue Date and Description8/14/23 - Stage Focus Problem


Estimated Fix Date and Comment

8/17/23 - Investigating source of problem


Responding StaffR. Harlan




Page Properties
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iLab Name
iLab Kiosk
FIC

Shared

Owner
Location

Cleanroom - Bay P

Max. Wafer

6"/150mm

Info Links/wiki/spaces/BNCWiki/pages/6251230| /wiki/spaces/BNCWiki/pages/6248646




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Table of Contents
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Overview

General Description

Tip

This is an example of a tip


Warning

This is an example of a tool warning

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure

  • SOP ()

         

View file
namePark NX20 AFM SOP.pdf
height150


Questions & Troubleshooting



Process Library


References