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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description


Estimated Fix Date and Comment

Responding Staff



Page Properties
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iLab Name

C - PIE Scientific Tergeo-Plus Plasma System

iLab Kiosk

BRK Etch Core

FIC

Shared

Owner

Francis Manfred

Location

BRK 2100K

Max. Wafer

6" / 150 mm

Info LinksInternal | Staff
Table of Content Zone
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Table of Contents
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Overview

General Description

Tip

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Warning

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Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library


References