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JEOL Manuals - Internal Resources
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| Insert excerpt | Internal - JEOL JBX-8100FS E-Beam Writer | Internal - JEOL JBX-8100FS E-Beam Writer |
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General References
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JEOL JEOL USA Semiconductor Equipment Documents - Electron Beam Lithography Georgia Tech 100 kV Electron Beam Lithography System: JBX-9300FS "JEOL JBX-9300FS Electron Beam Lithography System Training", Georgia Tech Yale YINQE EBL - Manuals and Documentation YINQE EBL - Software Downloads YINQE EBL - Electron-Beam Lithography Training University of Washington Cornell Shot Pitch and Write Time Calculator - XLS University of Michigan University of Minnesota Vistec EBPG5000 (with good process resources) Electron Properties |
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