/
Electron Beam Lithography

Electron Beam Lithography

Owned by Wirth, Justin C
Last updated: Aug 24, 2020


Charge Dissipation

References

University of Washington - EBL info

"Fundamentals of Electron Beam Exposure and Development", M. A. Mohammad et al., Nanofabrication (2012).


 Click here to expand...

Tool Information

Generating page properties report...

Related content

Processing
Processing
Birck Nanotechnology Center Wiki
More like this
Photoresists
Photoresists
Birck Nanotechnology Center Wiki
More like this
Tutorial on Etching
Tutorial on Etching
Birck Nanotechnology Center Wiki
More like this
Patterning
Patterning
Birck Nanotechnology Center Wiki
More like this
BNC Wiki Home
BNC Wiki Home
Birck Nanotechnology Center Wiki
More like this
Raith eLine E-Beam Writer
Raith eLine E-Beam Writer
Birck Nanotechnology Center Wiki
More like this