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iLab Name: Omicron Surface Analysis Cluster
iLab CoreKiosk: BRK Metrology Core
FIC:
Owner: Dmitry Zemlyanov
Location: BRK 1077
Maximum Wafer Size: N/A
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Overview
General Description
- High-Resolution Electron Energy Loss Spectrometer (HREELS)
- Ultra-High Vacuum Scanning Tunneling Microscope and Atomic Force Microscope
- Hemispherical Electron Energy Analyzer for XPS
- Ar Sputtering and Heating in UHV
- (UHV STM/AFM)
- X-ray photoelectron Spectroscopy (XPS)
- Low Energy Electron Diffraction (LEED)
- Sample cleaning/treatment: Ar Sputtering, Heating at 650C, expose to various gases
Specifications
Technology Overview
- Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library