Omicron Surface Analysis Cluster

Owned by Former user (Deleted)
Last updated: Aug 18, 2021 by dzemlian
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding StaffDmitry Zemlyanov


iLab Name: Omicron Surface Analysis Cluster
iLab Kiosk: BRK Metrology Core
Owner: Dmitry Zemlyanov
Location: BRK 1077
Maximum Wafer Size: N/A

Overview

General Description

  • High-Resolution Electron Energy Loss Spectrometer (HREELS)
  • Ultra-High Vacuum Scanning Tunneling Microscope and Atomic Force Microscope (UHV STM/AFM)
  • X-ray photoelectron Spectroscopy (XPS)
  • Low Energy Electron Diffraction (LEED)
  • Sample cleaning/treatment: Ar Sputtering, Heating at 650C, expose to various gases

Specifications

Technology Overview

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References