2025-05-05 to 2025-05-23: Semi-Annual Facility Preventive Maintenance

Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff	Dmitry Zemlyanov

iLab Name: Omicron Surface Analysis Cluster
iLab Kiosk: BRK Metrology Core
Owner: Dmitry Zemlyanov
Location: BRK 1077
Maximum Wafer Size: N/A

Overview

General Description

• High-Resolution Electron Energy Loss Spectrometer (HREELS)
• Ultra-High Vacuum Scanning Tunneling Microscope and Atomic Force Microscope (UHV STM/AFM)
• X-ray photoelectron Spectroscopy (XPS)
• Low Energy Electron Diffraction (LEED)
• Sample cleaning/treatment: Ar Sputtering, Heating at 650C, expose to various gases

Specifications

Technology Overview

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References