Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff	Dmitry Zemlyanov

iLab Name: Omicron Surface Analysis Cluster
iLab Kiosk: BRK Metrology Core
Owner: Dmitry Zemlyanov
Location: BRK 1077
Maximum Wafer Size: N/A

Overview

General Description

High-Resolution Electron Energy Loss Spectrometer (HREELS)
Ultra-High Vacuum Scanning Tunneling Microscope and Atomic Force Microscope (UHV STM/AFM)
X-ray photoelectron Spectroscopy (XPS)
Low Energy Electron Diffraction (LEED)
Sample cleaning/treatment: Ar Sputtering, Heating at 650C, expose to various gases