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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description

                


Estimated Fix Date and Comment

Responding StaffFrancis Manfred

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eLog - General Etching
eLog - General Etching
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Standard Operating Procedure (SOP):

View file
nameMarch Jupiter 2 SOP-F11-ManualMode8.pdf
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The document below explains how to minimize the reflected power manually when the tool cannot do it automatically.

View file
nameManual Tuning Procedure.pdf
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Table of Contents
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Overview

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idEtch_Capabilities


TypeMaterialsRestricted MaterialsAvailable GasesMax RF PowerWafer Size
CCP RIESi, Oxides, Nitrides, Polymers, Organics
O2, Ar, SF6600 Watts6 inch (150 mm) SEMI Specification



Section

Subsection

Sub-subsection

References

Spare Parts Sourcing

DescriptionVendorPart NumberDatasheetImage
Chamber Lid Closed SwitchDigikeyGH1365-NDhttp://www.grayhill.com/assets/1/7/Push_30.pdf

Pressure ManometerMKS Instruments

122A Abs. Manometer (Current)

622C Abs. Manometer (Recommended Replacement)

https://www.mksinst.com/Docs/R/122A-MAN.pdf

http://www.mksinst.com/docs/UR/622C626C-DS.pdf


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