| Insert excerpt |
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| Problem Reporting Guide |
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| Problem Reporting Guide |
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| nopanel | true |
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Down| Up | | Issue Date and Description |
Vacuum Leak & gas control isn't working | | Estimated Fix Date and Comment
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| | Responding Staff | Francis Manfred |
| Insert excerpt |
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| eLog - General Etching |
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| eLog - General Etching |
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| nopanel | true |
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Standard Operating Procedure (SOP): | View file |
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| name | March Jupiter 2 SOP-F11-ManualMode8.pdf |
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| height | 250 |
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The document below explains how to minimize the reflected power manually when the tool cannot do it automatically. | View file |
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| name | Manual Tuning Procedure.pdf |
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| height | 250 |
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