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Safety Requirements

  1. Safety glasses/goggles must be worn at all times inside the cleanroom.
  2. Solvent gloves will be required during this procedure.  They can be found...
  3. Chemical SDS documentation can be found in the gowning room.

Equipment Identification

  • Lesker Main Chamber
  • Vacuum Control Panel
  • Temescal Power Supply
  • Temescal control panel
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    Process Overview

    Child pages (Children Display)

    Source Materials

    1. Titanium
    2. Chromium
    3. Nickel
    4. Gold
    5. Palladium
    6. Molybdenum
    7. Aluminum
    8. Platinum

    This list represents the full tool capability.  Not all sources are installed at one time.  Source changes require at least 24 hours notice, and all sources will be supplied by Birck.  A list of currently installed source materials can be found here.

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