Process Overview

• 1. Lesker E-Beam Initial State Check
• 2. Lesker E-Beam Vent Chamber to Atmosphere
• 3. Lesker E-Beam Raise the Bell Jar
• 4. Lesker E-Beam Sample Loading
• 5. Lesker E-Beam Lowering the Bell Jar
• 6. Lesker E-Beam Evacuate to Low Vacuum
• 7. Lesker E-Beam Evacuate to High Vacuum
• 8. Lesker E-Beam Inficon Controller Configuration
• 9. Lesker E-Beam Material Deposition

Source Materials

1. Titanium
2. Chromium
3. Nickel
4. Gold
5. Palladium
6. Molybdenum
7. Aluminum
8. Platinum

This list represents the full tool capability.  Not all sources are installed at one time.  Source changes require at least 24 hours notice, and all sources will be supplied by Birck.  A list of currently installed source materials can be found here.