Overview
General Description
Probe Station I consists of a Micromanipulator 6000 Cascade MPS150 in a dark box on top of a vibration isolation table. The test equipment consists of an two Keithley SCS4200 4200A-SCS Semiconductor Parameter Analyzer, Analyzers, one equipped with C-V measurement capability. Also available is an HP 4284A LCR meter. A Windows-NT PC running Labview is used to drive the instruments and collect the dataheated stage (ERS model AC3) provides temperature control up to 200 C with sample sitting in ambient air.
